the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested. Radial Line Slot Antennas | SpringerLink Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these ... Radial Line Slot Antennas | Request PDF A radial line slot antenna (RLSA) is a nonresonant multimode waveguide slotted array. To improve the power handing capacity, we design a radial line slow wave structure which replaces a ... Near field distributions in radial line slot antennas for ... Abstract: The near field distributions in radial line slot antennas (RLSA) for surface wave coupled plasma (SWP) are examined. The RLSA are suitable for uniform, high density and large-area plasma generation. In order to realize higher productivity, quick evacuation of reaction gas a narrow gap process space is highly required.
the slots of the antenna. The spillover efficiency is maximiz ed during the design process. The antenna is centrally fed by a simple coaxial probe. The antenna design is validated by a prototype and measurements at 12.5 GHz. Index Terms—Near field, focusing, radial line slot array, RLSA, near-field shaping. I. INTRODUCTION
US7276990B2 - Single-pole multi-throw switch having low… No. 6,252,473 issued Jun. 26, 2001 and assigned to Hughes Electronics Corporation. This patent describes a waveguide switch using bulk mechanical actuators. USRE43699E1 - Reconfigurable scanner and RFID system using the… Specifically, the release of electromagnetic antenna signals from antenna 400 depends upon the annular plasma shield 420 being positioned at either one wavelength or greater from the antenna 400, or at distances equal to the wavenumber … US4185213A - Gaseous electrode for MHD generator - Google…
Radial Line Slot Antennas | Request PDF
LOW ELECTRON TEMPERATURE MICROWAVE SURFACE-WAVE PLASMA ... A surface wave plasma (SWP) source couples pulsed microwave (MW) energy into a processing chamber through, for example, a radial line slot antenna, to result in a low mean electron energy (T e).To prevent impingement of the microwave energy onto the surface of a substrate when plasma density is low between pulses, an ICP source, such as a helical inductive source, a planar RF coil, or other ...
The radial line slot antenna (RLSA) is a slotted waveguide planar antenna, which ... [5], which proves feasible in using radial line waveguide to feed the antenna .... Application,” IEEE Transactions on Plasma Science., vol. 43, pp. 3527. - 3529 ...
How can the answer be improved? Near-Field Distribution of Radial Line Slot Antenna for the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested. Radial Line Slot Antennas | SpringerLink
RLSA - Radial Line Slot Antenna
A radial line slot antenna (RLSA) 400 mm in diameter is designed for a plasma source at 8.3 GHz as a candidate for a large area high density plasma source with a narrow process space. A RLSA with paired slots arrayed concentrically on its aperture is designed and applied to a plasma process system which does not need a magnetic field.
Sep 16, 2016 · Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these Research - 東京工業大学 Our research themes are planar slotted waveguide antennas and electromagnetic theory. Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University.